Characterization of Ag and Ti/Au Electrodes for ZnO-Based Flexible Pressure Sensor Applications

1 Oct 2026, 08:45
15m
Cempaka, Level 3 (Tenera Hotel & Suites)

Cempaka, Level 3

Tenera Hotel & Suites

Bangi, Selangor, Malaysia
Nanoengineering Session 3B

Speaker

MASTURA SHAFINAZ ZAINAL ABIDIN (Faculty of Electrical Engineering, Universiti Teknologi Malaysia, Johor, Malaysia)

Description

Flexible capacitive pressure sensors are critical for wearable technologies, but traditional designs struggle with low sensitivity in low-pressure ranges, making the choice of electrode materials a crucial factor for achieving optimal electrical performance. This work presents a comparative study on the characterization of silver (Ag) and titanium/gold (Ti/Au) electrodes for the implementation of a zinc oxide (ZnO)-based flexible pressure sensor. The electrode–semiconductor interface plays a critical role in determining charge transport behavior, sensitivity, and stability of pressure sensors, particularly in low-pressure wearable applications. Fabricated on flexible Polyvinyl Chloride (PVC) substrates within a Metal-Insulator-Metal (MIM) architecture, the design utilizes ZnO interlayers to significantly amplify capacitance changes through inherent piezoelectric and polarization effects. Morphological evaluations confirmed that drop-casted Ag electrodes exhibit a granular structure that increases effective surface area, whereas sputtered Ti/Au electrodes present a highly uniform and smooth surface. Electrical characterization revealed that Ag electrodes exhibited linear current–voltage characteristics, indicating natural Ohmic contact behavior. Conversely, unoptimized Ti/Au electrodes demonstrated nonlinear responses associated with Schottky-type interfaces, impeding initial charge flow. A subsequent annealing treatment significantly reduced these interface barriers and improved the linearity and charge transport of the Ti/Au contacts. Ultimately, the findings highlight the profound influence of electrode material selection on the electrical performance and suitability of ZnO-based pressure sensors, guiding future developments in reliable wearable electronics.

Primary authors

MASTURA SHAFINAZ ZAINAL ABIDIN (Faculty of Electrical Engineering, Universiti Teknologi Malaysia, Johor, Malaysia) Mr WAN NAZHAN WAN MOHD ROSNAN (Faculty of Electrical Engineering, Universiti Teknologi Malaysia, Johor, Malaysia)

Co-authors

Dr AMIRJAN NAWABJAN (Faculty of Electrical Engineering, Universiti Teknologi Malaysia, Johor, Malaysia) Dr MOHD AMRI MD YUNUS (Faculty of Electrical Engineering, Universiti Teknologi Malaysia, Johor, Malaysia) Dr MOHD RIDZUAN AHMAD (Faculty of Electrical Engineering, Universiti Teknologi Malaysia, Johor, Malaysia) Dr SHAHARIN FADZLI ABDUL RAHMAN (Faculty of Electrical Engineering, Universiti Teknologi Malaysia, Johor, Malaysia) Zaharah Johari (UNIVERSITI TEKNOLOGI MALAYSIA)

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